ŸOn-Line ICP-MS Airborne Metal Particle Monitoring System for Clean Room Ÿ


Newly DevelopedI@Sigma-f,Co.,Ltd. is introducing the new method for direct analysis of Gas sample by ICP-MS

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Ÿ It is a seriousness for FPD, Semi-Conductor and HDD Manufacturers to face the Quality and Reliability problem caused by Airborne Metal Particles in the Clean Room.
Ÿ The Particle Counter is generally used for the measurement of the Qty., and Size Distribution of Particles. ICP-MS is useful for analysis of Metal Element, but needs the pre-treatment to make an Aerosol sample. Therefore, it is difficult to analyze the Metal Element of Particle as the Real time On-line Monitoring.
Ÿ The Air-based Metal Particles sample can be converted to the Ar(Argon99.99%)-based sample with employing the GAS Converter, which is introduced into the ICP-MS directly without time-wasted pre-treatment.
Ÿ The GAS Converter combined with ICP-MS is fully recommended to analyze the Airborne Metal Particles for finding the Emission source as the real time Monitoring Apparatus in Clean Room of manufacturing Process. We believe that it becomes easier to find one/some of causes for production yield problem.

yMetal Contaminationz
There is a lot of potential of Metal/Ion contamination in the Clean Room as shown below;

The chemical analytical instrument are required to detect the Metal/Ion element and find out the emission source of Metal/Ion element, Such as Ion chromatography, ICP-AES, MIP-AES and ICP-MS. Among these instruments, ICP-MS has superiority in terms of High sensitivity, wider dynamic range and Short measurement time for the metal element analysis. However it has a difficulty with introducing the clean room Gas sample directly to the ICP-MS, and unable to achieve the real time air monitoring in the clean room


yGas Converter(Gas Exchange Device)z


Gas Converter GE seriesiSUMITOMO SEIKA CHEMICALS Co.,Ltd.)



yFeaturesz
It features as following points, not only for clean room air monitoring use, but also for the environmental air monitoring use.


The GAS Converter is consisted of two concentric Glass tubes, where inner tube is made of porous glass tube.
Air Sample Gas contained Particles is introduced into the inner tube , and, the excess amount of Sweep Gas (Ar)
is supplied to the outer tube. Then Gas molecules (N2,O2,CO2, and H2O) in the Air sample are exchanged to Sweep Gas molecule(Ar),
while Metal Particles in the Air sample remains in the inner tube due to slower diffusion speed.



yComparison Tablez

Both Thermo Fisher Scientific ICP|MS(X-series 2) and Agilent TechnologiesICP|MS(7700seriesjhave been confirmed to install the Gas converter.
yApplicationz

Gas Converter, GE series, has been jointly developed by SUMITOMO SEIKA CHEMICALS Co.,Ltd.and J-Science Labo Co.,Ltd. based upon their past expertise and technologies.
With employing the new calibration techniques and applications, the Real-Time Multi-Element monitoring in both PM2.5 and single Airborne particulate matter(APM) can be achieved.
The standard type enables up to 200mL/min.of Gas sample input. Larger type, 600mL/min or more. is studied to develop.

yExample of measurementz
Operation manual of GE series
Test Data for air sample in the Clean Room

yReferencez

Sigma-f, Co.,Ltd.
Room#406 11-12, Yushima 1-choume, Bunkyo-ku, Tokyo 113-0034 Japan
TEL:+81-3-5805-7767 FAX:0+81-3-5800-0877
E-Mail here

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